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كما اقترح استخدام الروثينيوم في تصنيع الإلكترونيات الميكروية بسبب توافقه مع تقنيات تصنيع شبه موصل أنصاف النواقل]. cite journal chapter Etching Byproducts of Ruthenium Wafers Using Various Etching Ch istries first1 A. H.B. last1 Cheng first2 M. last2 ...
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